摘要
用射频溅射制备了ZrO2 膜 ,发现膜呈压应力剥落 ,用X射线衍射分析了薄膜中的应力 ,提出了避免剥落的对策。
ZrO_2films were deposited with rf sputteringX-ray diffraction method was used for analyzing the stress in the films,which could explain why the films peel off.A strategy for avoiding peeling was proposed.
出处
《中国陶瓷》
CAS
CSCD
北大核心
2000年第2期1-3,共3页
China Ceramics
