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压电MEMS超声换能器研究进展 被引量：8

Progress in piezoelectric MEMS ultrasonic transducers
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摘要 MEMS(micro-electromechanical systems)超声换能器(MEMS ultrasonic transducer,简称MUT)是采用微电子和微机械加工技术制作的新型超声换能器。与传统超声换能器相比,MUT具有体积小、重量轻、成本低、功耗低、可靠性高、频率控制灵活、频带宽、灵敏度高以及易于与电路集成和实现智能化等特点。是超声换能器的重要的研究方向之一。MUT的研究主要包括压电MUT(piezoelectric MUT,简称PMUT)和电容MUT(capacitiveMUT,简称CMUT)两个方面。本文概述了PMUT研究的发展进程和研究成果,展望了PMUT的研究和应用前景。 MEMS ultrasonic transducers device （MUT） is a new type of ultrasonic transducer which is the use of microelectronics and micromachining technology to manufacture. Compared with conventional ultrasound transducer, the MUT has the advantage of small size, light weight, low cost, low power consumption, high reliability, flexible control of frequency, frequency bandwidth, high sensitivity and easy with the integrated circuit, and implement intelligent. MUT is one of the important research directions of the ultrasonic transducers. MUT research mainly includes two aspects of the piezoelectric MUT （PMUT） and the capacitive MUT （CMUT）. This article provides an overview of the development process and research findings of the PMUT, and future research and application prospects of PMUT.
作者 栾桂冬
机构地区 北京大学信息科学技术学院
出处 《应用声学》 CSCD 北大核心 2012年第3期161-170,共10页 Journal of Applied Acoustics
关键词 微机械 压电 超声换能器 Micro-mechanical, Piezoelectric, Ultrasonic transducer
分类号 TB552 [理学—声学] O426 [理学—声学]
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参考文献33

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二级参考文献42

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共引文献10

同被引文献40

  • 1顾威,桂治轮,李龙土,董蜀湘.高Q_m、低损耗压电陶瓷材料的研究[J].硅酸盐通报,1994,13(3):24-27. 被引量：10
  • 2贾宝贤,边文凤,赵万生,王振龙.压电超声换能器的应用与发展[J].压电与声光,2005,27(2):131-135. 被引量：50
  • 3陈敏,徐利梅,黄大贵,张德银.基于MATLAB的换能器阵列指向性分析方法研究[J].电声技术,2006,30(5):25-28. 被引量：15
  • 4晏伯武.大功率铅基压电陶瓷材料的研究进展[J].佛山陶瓷,2007,17(5):34-39. 被引量：1
  • 5李文龙,菅喜岐.超声成像换能器技术的发展[J].国际生物医学工程杂志,2008,31(2):82-85.
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  • 9Gurun G,Tekes C,Zahorian J,et al.Single chip CMUT-on- CMOS front-end system for real-time volumetric IVUS and ICE imaging[J].IEEE Trans Ultrason Ferroelectr Freq Control,2014,61 (2) :239-250.
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引证文献8

二级引证文献19

应用声学
2012年 第3期

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