摘要
六氟化硫(SF6)具有优异的化学稳定性和电绝缘性能而使其广泛应用于电器和开关等设备及多种领域;但SF6是一种被列入《京都议定书》的强温室气体,今后将被逐渐禁止使用。当前解决SF6排放问题最有效的方法是用低全球变暖势(GWP)的气体完全代替SF6。详细介绍了在电气绝缘、镁合金冶炼、半导体蚀刻和清洗等领域中SF6的替代技术进展。
The sulfur hexafluoride （SF6） is widely used in the electrical apparatus and switch as well as other equipment and many fields due to its excellent chemical stability and electrical insulation performance. However, the SF6 is a strong greenhouse gas listed in the Kyoto Protocol, So it will be stepwise forbidden in the future applications. Currently the most effective method for solving the SF6 emission problem is completely alternating SF6 by using the gases with lower global warming potential （GWP）. The alternative technology progress of SF6 in the electrical insulation, magnesium alloy smelting, semiconductor etching and cleaning, etc. is introduced in detail.
出处
《化学推进剂与高分子材料》
CAS
2012年第4期41-48,共8页
Chemical Propellants & Polymeric Materials
关键词
六氟化硫
温室气体
替代品
GWP
技术进展
sulfur hexafluoride
greenhouse gas
alternative
GWP
technology progress
