MgB_2超导体的相图及其对薄膜制备的指导作用

The Phase Diagram of MgB_2 Superconductor and its Guiding to Thin Film Preparation

MgB2适合于制备约瑟夫森结,在超导电子学领域有很好的应用前景。制备高质量的MgB2薄膜至关重要,应用Mg-B/Mg-B-O体系的相图指导MgB2薄膜生长意义重大。总结MgB2相体系及相关系,详细对比分析Mg-B/Mg-B-O体系的热力学相图,总结分析富氧区杂项MgO的生成机理及其对MgB2薄膜质量和性能的影响,研究分析有氧体系下Mg-B/Mg-B-O热力学相图对MgB2薄膜材料制备生长的指导意义,探讨HPCVD环境下采用原位生长技术制备MgB2超导薄膜时热力学相图的指导作用及相关制备工艺。

MgB2 is well fitted for the implementation of Josephson junction,and is useful in superconductor electrics.Preparation of high-quality MgB2 thin film is critical.The Mg-B/Mg-B-O thermodynamics phase diagram and its phase relation has important value in preparation for high-quality MgB2 film.In this paper,some aspects of MgB2 thin film preparation were involved,including the current progress of superconducting MgB2,the Mg-B/Mg-B-O thermodynamics phase diagram and its phase relation,the information mechanism of MgO phase in oxygen-rich region and its influence to MgB2 thin film growing.Then,the guidance to MgB2 film of Mg-B/Mg-B-O thermodynamics phase diagram was discussed in detail.At last,the HPCVD（Hybrid Physical Chemical Vapor Deposition）in-situ thin film fabrication methods under the guiding of MgB2 phase diagram was proposed.