硅片自动上下料设备的研制

Developing Of Silicon Wafer Automatic Loading&Unloading Equipment

通过分析太阳能电池制造过程中硅片的上料和下料方式的现状,提出自动上下料设备研制的必要,介绍了全自动硅片上下料设备的技术参数和工艺流程,详细分析了设备的结构设计,包括自动换蓝组件、装片组件、缓存组件、传动系统、电气控制系统和设备主体等。

This thesis expounded the necessity of the automatic loading ＆ unloading equipment through analyzing the loading ＆ unloading mode in solar cell manufacture. It introduced the technical parameters and process of the automatic loading ＆ unloading equipment .It analysis the equipment＇s structure. The equipment included a cassette automatic circular module ,a wafer loading module, a wafer buffer module, a driver system ,a electrical control system and the main framework.