摘要
化学机械抛光过程中,抛光垫性能是影响抛光质量和抛光效率的重要因素之一,而抛光垫的性能又受其表面沟槽结构形状的影响。在介绍几种常见抛光垫沟槽结构形状的特性及其作用研究的基础上,介绍了新型抛光垫沟槽的研究进展,总结了几种新型抛光垫沟槽对抛光效果的影响,为抛光垫沟槽特性的进一步研究提供参考。
In the process of chemical mechanical polishing( CMP), the performance of polishing pad is one of the most important factors that affects the quality of polished surface and polishing; efficiency, which is influenced by the surface groove shape of the pad surface. In order to provide a reference for further research on the groove performances of polishing pad, the research progress on new groove structures of polishing pad was presented, and the effects of new pad groove structures on the CMP processes were summarized.
出处
《金刚石与磨料磨具工程》
CAS
2012年第2期77-81,共5页
Diamond & Abrasives Engineering
基金
国家自然科学基金项目(No.51175092)
教育部高校博士学科专项科研基金项目(No.20104420110002)
广东省自然科学基金项目(No.10151009001000036)资助
关键词
化学机械抛光
抛光垫
表面沟槽
chemical mechanical polishing
polishing pad
surface groove