高分辨率电子工业用数字化X射线检测系统

High-resolution X-ray digital radiography of electronic industry

提出一种高分辨率电子工业用数字化X射线检测系统的总体设计方案,选择微焦斑X射线源和双近贴式X射线像增强器作为该系统的关键器件,分析了微焦斑X射线源的焦斑尺寸对系统分辨率的影响,并且建立了微焦斑X射线源和双近贴式X射线像增强器自身分辨率及成像的几何放大率对系统最终分辨率影响的数学模型。通过数学模型得出了几何放大率同系统分辨率的关系曲线。设计了光路及图像采集装置,并用VC 6.0完成了实用的X射线图像处理软件,研制了完整的成像系统样机并进行了调试与实验。这种成像系统有效视野可达75mm,分辨率为160lp/cm。

This paper introduced a design of high-resolution digital X-ray detection system used in electronic industry. According to the requirement of the design, this paper put forward the overall scheme of the system, researched and selected the micro-focal spot X-ray source and double proximity focusing X-ray intensifier as the key devices in the system, analyzed the influ- ence on the final resolution caused by their own resolution of micro-focal spot X-ray source, double proximity X-ray intensifier and the system magnification. It designed the light path, image acquisition device and acquisition software, developed a complete imaging system proto- type, and carried out debugging and experiment on it ,then completed the practical X-ray im- age processing software by using VC 6.0. Results show that the effective vision of this imaging system achieves up to 75 ram, and the resolution is 160 lp/cm.