烧结制度对二钛酸钡陶瓷性能的影响研究

Effect of Sintering Technology on the Properties of BaTi_2O_5 Ceramics

二钛酸钡具有优异的介电性能和铁电性能,作为无铅无铋新型的绿色环保材料在动态随机存储器、非挥发铁电存储器等方向将具有广阔的发展空间。本文讨论了烧结致密化对其物相组成及微观形貌的影响。结果表明:在1200℃以内,随烧结温度的升高,晶粒趋于均匀,气孔率下降,致密化程度提高。随烧结压力的升高,试样的相对密度逐渐提高,说明提高烧结压力可有效改善BaTi_2O_5陶瓷的烧结程度。50MPa时,试样的致密度达到最大值86.70%,可基本满足制备薄膜靶材的使用要求。

As a lead-free environment-friendly material, BaTi2O5 with excellent dielectric and ferroelectric properties has attracted much attention due to its potential applications in devices of high density dynamic random access memories （DRAM） and non-volatile ferroelectric random access memories （FRAM）. The effects of the sintering process （sintering temperature and sintering pressure） on structure and dielectric properties were studied in this paper. The results showed： sintering temperature and sintering pressure can improve the density and grain size. The grain size tended to be uniform and the porosity decreased when the sintering temperature increased. The relative density increased gradually with the sintering pressure increased, which would be the maximum （86.70%） at 50MPa. It can basically meet the requirements of targets for films.