透红外/可见光学窗的电磁波屏蔽技术

Study on Electromagnetic Shielding of Infrared /Visible Optical Window

针对电磁辐射对日常生活、社会安全以及军事等领域所造成的危害,研究透红外/可见光学窗电磁波屏蔽技术。为降低传统金属网栅可见和红外波透过率低的问题,提出在光学窗上制作由ITO、SnO2等氧化物膜构成透明导电网栅。从理论分析入手分析导电网栅线宽、周期对光电特性的影响,利用镀膜、光刻及化学腐蚀方法制备线宽和周期不等的ITO膜网栅,并将其结果与金属网栅进行对比分析得出结论:红外透过率方面,ITO膜网栅大于金属网栅,并且相差较多,可达10%以上;而屏蔽效率方面ITO膜网栅小于金属网栅,但相差很小,最大仅2～3 dB。因此,透明导电膜网栅代替金属网栅用于解决红外透过率与屏蔽效率的矛盾实用价值更高。

In allusion to electromagnetic radiation damage that existed in daily life, social safety and military field, electromagnetic shielding technology of infrared and infrared optical window was studied. Transparent conductive film mesh was proposed in optical window, the mesh is composed of oxide films including ITO, SnO2 etc, for decreasing infrared and visible low transmission problem of traditional metal mesh. The effects of photoelectric properties comes from mesh line width and cycle was analysised in this paper, different line width and cycle ITO film mesh was manufactured,by the way of coating, lithography and chemical erosion method. The Comparison Study of ITO film mesh and metal mesh, we concluded that infrared transmission of ITO mesh is higher than metal mesh, and even more than 10%; that shielding efficiency of ITO mesh is lower than metal mesh, but the gap is less, only 2-3 dB. So it has practical value by ITO mesh instead of metal mesh.