利用COMSOL软件对1D-BPM电极影响的仿真及分析(英文)

Simulation Based on COMSOL for Effect of Electrode Configuration on 1D-BPM

基于微机电系统(MEMS)微加工技术和Pb(Mg1/3Nb2/3)O3-PbTiO3(PMN-PT)电光材料设计的一维二进制码相位调制器(1D-BPM)可用于激光显示技术中的散斑消除。建立了1D-BPM数学模型,推导出电极在PMN-PT片内产生的电场和PMN-PT折射率变化导致通过的光束相位变化的关系。采用有限元分析方法仿真了电极几何尺寸对相位的影响,发现当电极尺寸在亚微米级时,两电极间相位分布不仅依赖于电极产生的电场大小,而且受到电极几何尺寸的影响。电极角效应是器件设计及优化时需考虑的重要因素。

One-dimensional dimension binary-code phase modulator（1D-BPM） for speckle reduction in laser display system is designed based on Pb（Mg1/3Nb2/3）O3-PbTiO3（PMN-PT） and microelectromechnical system（MEMS） microfabrication technology.Mathematical model of 1D-BPM is built up,and the relationship between phase shift and electrical field applied by electrodes is deduced.Electrode configuration is investigated by simulation with finite element analysis.We find that the phase distribution across the gap between two electrodes depends not only on the electric field applied by electrodes,but also on the electrodes′ configuration when their dimensions are on the submicron order.Electrodes corner effect is the significant factors for device design and optimization.