摘要
为了解决神光系列装置所需长焦透镜焦距的检测问题,在现有斐索干涉仪的基础上,对常规组合透镜方法进行了拓展,提出了双探头光栅尺法。对两种方法的工作原理及检测方法进行了分析,同时计算分析了测量数据误差对测量结果的影响,得出测量数据测量误差的上限要求。这两种方法具有测量精度高、重复性好、测量过程简单的优点,对于各类透镜焦距的检测具有重要的实用价值。
Based on Fizeau interferometer, conventional combined lens method is developed to be double detectors grating ruler method. The measure principles of both methods are analyzed, and the influence to the results is analyzed. The upper limit of data error is received. Both methods have the adavantages of high accuracy and good repeatability, and have the im- portant applied value for the measurement of all kinds of focus length.
出处
《光学与光电技术》
2012年第4期46-49,共4页
Optics & Optoelectronic Technology
基金
国家重大专项项目(GFZX0205XXX)资助项目
关键词
光学测量
焦距
组合透镜
双探头光栅尺
optics measurement
focal length
combined lens
double detectors grating ruler
