摘要
SnO2 透明导电膜的光学、电学特性与它的结构有关 .研究衬底温度对薄膜结构的影响表明 :衬底温度影响薄膜的结晶程度 ,衬底温度高 ,容易结晶化 ,衬底温度低 ,则易形成无定形结构的膜 .
The optical and electrical properties of tranparent conducting-film are related to its structure.The effect of substrate temprature on the structure is studied.The result indicates that substrate temprature influences the crystallinity of SnO 2 films.The films are crystal at high temprature and amorphous crystal at low temprature.
出处
《咸宁师专学报》
2000年第3期53-55,共3页
Journal of Xianning Teachers College
关键词
衬底温度
透明导电膜
薄膜结构
substrate temprature
transparent conducting-film
structure
