扫描电子显微镜在粒度分析中的应用

Application of Scanning Electron Microscope in the Field of Particle Size Analysis

扫描电子显微镜(SEM)是利用聚焦极细的电子束作为照明源,以光栅状扫描方式照射到试样表面,并以入射电子与试样相互作用所产生的信息来进行成像的。采用扫描电子显微镜对收集在微孔滤膜上的颗粒进行分析,不仅可以观察微小颗粒的表面形貌,还可以与能谱仪配合进行颗粒粒径及数量的测量与统计,测试准确度高,因而在粒度分析领域具有不可替代的作用。主要介绍扫描电子显微镜在粒度分析中的应用。

Illuminating source of Scanning Electron Microscope （SEM） used focused electron beam which irradiated the surface of sampies with raster scan and then the SEM made use of information to imaging which was generated by the interaction of incidence electron and samples. The surface appearance of particles collected on micro aperture filtration membrane could be observed and analyzed via SEM. Furthermore, SEM had the function of measuring particle size and quantity with high accuraey which couldn＇ t be replaced in particle size analysis while connecting with energy dispersive spectrometer. So the applieation of scanning electron microscope in the field of particle size analysis was introduced ira this paper＇.