激光沉积红外窗口高性能类金刚石膜技术

Pulsed Laser Deposition Technology for High Performance Diamond-Like Carbon Films on Infrared Window

类金刚石（DLC）膜具有宽光谱高透射率、高硬度、高热传导及高稳定性等优点，是红外窗口增透保护膜的优选，但现有方法制备的类金刚石膜难以满足高马赫数或海上盐雾等恶劣条件下的应用。激光法相比其他制备方法具有诸多优点，介绍了激光法制备DLC膜的原理及特点，并分析了实现工程应用的难题及关键技术。采用激光沉积法制备出综合性能优异的类金刚石膜，纳米硬度高达44GPa、内应力仅0．8GPa、临界刮擦载荷附着力为59．1mN。正面镀DLC膜，背面镀普通增透膜的硫化锌、硅、锗等红外窗口的平均透射率达82％～91％。实现了≠150mm基片的激光法大尺寸均匀薄膜，膜厚不均匀性≤±2％。制备的DLC膜红外窗口通过军标环境适应性试验，并已实现工程化应用。

Diamond-like carbon （DLC） film characteries high transmittance in wide spectrum, high hardness, good heat exchange and stability. It can be used as perfect anti-reflective and protective film for infrared windows. However, DLC films in existence can not be used under bad conditions, such as flying in high mach number or steering in ocean. Compared to other deposition methods, pulsed laser deposition （PLD） has many merits. Principle and characters of PLD to deposite DLC film were introduced. Problems and key technology for engineering application were also analyzed. DLC films were deposited by PLD. The nano-hardness was up to 44 GPa, inner-stress is only 0.8 GPa and adhesion of critical load is 59.1 mN, Average transmittance of ZnS, Si and Ge windows coated by DLC films and common anti-reflective films reached 82 % -91%. and thickness asymmetry no larger than 2 %. The windows realized optical engineering application. Uniform DLC film was deposited on 150 mm substrate coated by DLC films passed military standard tests and