光吸收调制微加工技术中偶氮材料光吸收率的时间变化特性

Variation of Absorptivity with Time of Azo-Material in Absorbption Modulation Micro-Fabrication Technique

基于偶氮材料光吸收调制的高分辨率微加工技术近年来引起了极大关注。为揭示该技术中偶氮材料光吸收调制的机制，结合偶氮材料光致异构原理，利用偶氮材料的光吸收理论模型，数值模拟了偶氮材料光吸收率的时间变化特性。以典型偶氮苯染料分散黄7（Disperse Yellow7-DY7）为例，分别开展了在365niTl光束单独作用和365nm与532nm双光束共同作用下，不同厚度DY7薄膜在365nm光吸收率的时间变化特性实验研究。结果表明，在365nm光束作用下，偶氮苯材料对365nm光吸收率因光致异构效应发生了明显改变，而实验中532nm光束的热效应对偶氮苯材料的光吸收率有显著的影响。

The super-resolution micro-fabrication technique based on the optical absorption modulation of azo- material is attracting attentions for decades. To reveal the mechanism of the optical absorbance modulation of azo- material, the simulations of the variation of absorptivity with time are implemented based on the optical absorption model and the photo-isomerization principles of azo-material. Some membrane samples with different thicknesses are obtained by using a typical azobenzene dye [-disperse yellow 7 （DY7）], and the experiment to study the variation of absorptivity with time of these samples is implemented, with 365 nm illumination only and 365 nm and 532 nm illumination together, respectively. The results indicate that the obsorptivity of azobenzene at 365 nm varies significantly due to the photo-isomerization of azobenzene, and it is influnced by the thermal effect due to 532 nm illumination.