一次生长多根硅芯设备的结构设计

Structure Design of the Silicon Core Furnace Producing SeveralSilicon Cores Once

多晶硅是单晶硅生产中必不可少的主要原料,硅芯是多晶硅生产过程中生长多晶的载体。而硅芯炉,主要用于生产多晶硅载体-硅芯。硅芯炉是在惰性气氛下,以高频感应加热,采用区熔法生长硅芯的设备,可一次同时生长多根硅芯,一炉次生产多组硅芯的设备。该设备由机械部分、电气控制部分以及高频电源三大部分组成。论文只对机械结构部份论述,其结构由底座、槽路支架、下传动、炉室、过渡付室、提拉头、真空系统、充气系统、水路等部分构成。

Polysilicon is the main raw material which is necessary in mono crystal silicon production. Silicon core is the carrier for polycrystalline growth in the process of polysilicon production. Silicon Core Furnace is mainly used for producing the growth carrier of polysiliconsilicon core in the process of polysilicon production. Silicon Core Furnace is high frequency induction heating equipment which adopts zone melting method to produce silicon core in inert atmosphere and can produce several silicon cores once as well as produce several silicon cores in one furnace. The equipment is composed of three major parts, namely, mechanical part, electrical control part and high frequency power supply. This paper will analyze the mechanical part, which contains base frame, tank circuit support, under drive, furnace chamber, transient attached room, lifting end, vacuum system, inflation system, water course.