微笔-激光直写组合加工制备多电极阵列系统

Fabrication of multi-electrode array system by micropen-laser hybrid direct writing technology

针对传统的硅基微加工技术因依赖掩模光刻技术而柔性化程度低的不足,以石英玻璃为基底、金为微电极材料体系,利用微笔-激光直写组合加工技术制作了带有微区温控特性的多电极阵列系统.实验结果表明:金电极导体线宽44μm,膜厚12μm,平均电阻率1.2×10-6Ω.cm,电极阻抗随频率的升高而降低,在低频时表现为容抗特性,具有较好的阻抗重复精度;用于微区温控的环形加热电阻在15～28V,通电电压对微区加热温度的关系具有较好的线性控制能力,环形热敏电阻在15.0～80.0℃范围内的电阻温度系数值为2 805×10-6/℃,温度响应性能满足应用要求.

Because of the dependence on lithography mask,traditional silicon micro-machining technology has the disadvantage of low flexibility.Using fused quartz/gold as the substrate/electrode material system,a multi-electrode array system with backside local area temperature control circuit was fabricated by the micropen-laser hybrid direct writing technology.The experimental results show that the gold electrode＇s resistivity is 1.2×10^-6 Ω·cm with 44 μm line-width and 12 μm film thickness,and the electrode impedance decreases with the frequency increases.In low frequency for capacitive reactance characteristics,its impedance repeatability is satisfying for the accuracy of the multi-electrode array.The resistance of the circular heating resistor in the local area temperature control circuit has good linear control from 15 to 28 V.The thermistor has the temperature coefficient of resistance（TCR） value of 2 805×10^-6 /℃ within in the scope of 15.0-80.0 ℃,which can meet the application requirements.