流延共烧结制备极限电流式氧传感器的研究

Study on preparation of limitting current type oxygen sensor by tape casting and co-fired technique

以流延成型工艺制备钇稳氧化锆(YSZ)基片,采用丝网印刷、等静压叠层工艺,经1450℃共烧结制备极限电流式氧传感器。采用XRD,SEM对其物理性能进行表征,并在650℃、氧体积分数为0%～90%范围内对该陶瓷器件的伏—安特性、响应时间等输出特性进行研究,实验结果表明:该传感器在其体积分数范围内具有良好的极限电流平台,响应时间小于9 s(氧体积分数从20%～75%),准确度达到0.5%。

Tape casting process is used to produce yttria stabilized zirconia（YSZ） substrates. The limiting current type oxygen sensor by screen printing, isostatic laminating and co-fired at 1450℃. The physical characteristics are investigated by X-ray diffraetometer and scanning electron microscope. The response time and V-I characteristics of oxygen sensor are tested at 650℃ with the oxygen volume fraction range 0 % -90 %. The result shows that this sensor has good limitting current platforms in the above range of the oxygen. The response time is less than 9 s（ the oxygen volume fraction range 20 %-75 % ） and the accuracy can reach 0, 5 %.