纳米材料互连技术研究进展

Advances in Nanomaterials Interconnect Technology

纳米材料的互连技术是由纳米材料走向纳米器件的桥梁,是推动纳米材料大规模应用的必然基础之一。综述了近年来报道的可控的纳米材料焊接互连方法,包括焦耳热焊接、电子束焊接、光束焊接和原子力显微镜焊接,对其原理和特点进行了分析,并对此领域的发展趋势进行了展望。

The nano-interconnect technology acts as a bridge to lead the nanomaterials into the nano-divices,and becomes one of the groundworks to promote nanomaterials in mass application.Review the research and development of controllable nano-welding interconnection methods in recent years including the Joule heat welding,electron-beam welding,optical welding and AFM welding.The principles and characteristics of these methods were analyzed,and the trend in this area is forecasted.