集成电路测试系统中波形数字化仪的校准研究

Calibration Research on Digitizer of IC Test System

文章介绍了波形数字化仪的原理、结构、工作方式及特点,并针对其校准技术进行了深入的研究。通过多功能校准源、示波器及测试系统数字模块实现波形数字化仪模块的精确校准,解决了波形数字化仪模块的校准问题。校准结果表明,该校准装置及校准方法能够满足集成电路测试系统任意波形发生器的校准要求。

The theoretics, the architectures, operational styles and characteristics o{ waveform digitizer are introduced. This paper also make a thorough research on the calibration technology of digitizer. In this paper, the accurate calibration of mixed-signal is realized with multi-product calibrator, oscilloscope and digital module of IC test system. The problem of calibration for digitizer of IC test system is also solved. The result of calibration proved that the device and the method meet the requirement of calibration for digitizer of IC test system.