Structure and magneto-electrical properties of Fe-C films prepared by magnetron sputtering

Fe-doped amorphous FexCl~ granular films were prepared on n-Si （100） substrates by d.c. magnetron sputtering. The structur- al properties of FexC1-x films were investigated by X-ray diffraction （XRD）, atomic force microscope （AFM） and Raman spec- troscopy. The results show that the iron and carbon of as-deposited films are in amorphous state, and the FexC1-x films are di- amond-like carbon （DLC） films. After doping iron into the DLC films, a smooth surface morphology of the FexC1-x films has been obtained with the surface roughness Ra of about 0.231 nm for x=18at%. The FexC1-x films have good soft magnetic prop- erties with the coercivity of approximately 20 Oe. A high positive magnetoresistance （MR） up to 93% with x=lat% was ob- served in a FexCl-x granular film at 300 K. The resistance characteristic of Fe-C films is changed at about 230 K and the positive MR effect can be understood by the p-n heterojunction theory.

Fe-doped amorphous Fe x C 1 x granular films were prepared on n-Si(100) substrates by d.c.magnetron sputtering.The structural properties of Fe x C 1 x films were investigated by X-ray diffraction(XRD),atomic force microscope(AFM) and Raman spectroscopy.The results show that the iron and carbon of as-deposited films are in amorphous state,and the Fe x C 1 x films are diamond-like carbon(DLC) films.After doping iron into the DLC films,a smooth surface morphology of the Fe x C 1 x films has been obtained with the surface roughness Ra of about 0.231 nm for x=18at%.The Fe x C 1 x films have good soft magnetic properties with the coercivity of approximately 20 Oe.A high positive magnetoresistance(MR) up to 93% with x=1at% was observed in a Fe x C 1 x granular film at 300 K.The resistance characteristic of Fe-C films is changed at about 230 K and the positive MR effect can be understood by the p-n heterojunction theory.