多晶硅铸锭新工艺的研究

A Research on New Technology for Polysilicon Ingots

多晶硅定向凝固铸锭技术是多晶硅太阳能电池生产的关键技术之一。本文提出多晶硅铸锭新技术-（SRS）法，与传统工艺相比，SRS工艺提纯效果更明显，硅锭中间部分杂质含量更低，硅锭的少子寿命和电阻率更高且分布均匀，大大提高了硅料从硅锭到硅片的利用率。

The directional solidification ingot technology of polysilicon is one of the key technologies for the production of polycrystalline silicon solar cells. This work presents a new technologyof polycrystalline silicon ingot--Solidification Remelt Solidification （SRS）, Compared with the traditional process, the purification effect of SRS process is more pronounced, the impurity of the middle part ingot content lower, the minority carrier lifetime and resistivity of the silicon ingot is higher and uniformly distributed, the utilization of the silicon from ingot to wafer can be greatly improved.