反射干涉光谱法测量固体薄膜的光学常数和厚度

A Reflection Interference Method for Determining Optical Constants and Thickness of a Thin Solid Film

本文报道一种简单的方法 ,从平面介质薄膜的反射干涉光谱来计算薄膜的光学常数和厚度。当一束光照射在基板上的介质膜上时 ,由于膜上下界面反射光的相干 ,会使反射光谱的曲线有一定的波动。我们对反射相干光谱进行理论分析 ,给出计算公式 ,从测量曲线中的实验值得出薄膜的光学常数 n、k以及厚度等参数。此种方法简单可行 ,而且易于编程处理。

In this paper we report a simple method for dedu cing optical constants and thickness from the reflection interference spectrum o f a thin transparent film which is on a substrate of high reflection coefficient .When a light beam is incident on the surface of the film,the reflection light b eams at the front and rear faces are coherent.We calculated the optical constant s and thickness of the film from the reflection spectrum.This simple method make s a directly programmable calculation possible.