基于微力测量的微纳米测头系统设计及优化

Optimal Design of Micro-nano Probe System Based on Micro-force Measurement

针对国内外研制的微纳米测头测量时无法实时测量测力的大小和方向,无法实时修正不同方向和大小的测力、不同长度测杆受力变形等引起的测量误差的缺点,研制了一种基于六维微力测量原理的自修正微纳米测头系统,可以实时测量测力的大小和方向,进而获得测头位移和变形量的大小和方向,计算出由于测球测杆受力变形引起的测量误差,通过误差修正模型进行实时自修正,提高测头的测量精度。为了实现测头级的测量灵敏度,应用ANSYS软件和正交试验方法进行结构优化设计,确定测头的基本几何尺寸和测头弹性体上测量不同方向测力的最佳测量区域,为后续的测头加工提供理论基础。最终的分析结果证明了测头x和y方向的测量灵敏度可以达到25.5μεz,方向的测量灵敏度可以达到11.7με。

The present developed micro -nano probe can not measure force magnitude and direction in real time so that the measurement error caused by the different direction measurement force and the deformation of different length measuring rod can not be corrected in real time. In order to solve this problem, a new self - correction mi- cro- nano probe system was developed based on six -dimensional micro -force measuring principle. It can measure the real time magnitude and direction of the measurement force and the deformation, calculate out the measurement error caused by the measuring rod stress and deformation, and correct the measurement error in real time by building the error correction model. In order to reach the mN level probe measurement sensitivity, the structural optimization design was done by using ANSYS software and orthogonal test method, The geometry of probe and the optimal measurement area in elastic body were determined, which provided the theoretical basis for the following probe processing. The analysis result proves that the probe measurement sensitivity can reach 25.5 με/mN in x and y direction, and can reach 11.7 με/mN in z direction.