摘要
简述美国标准AMS 2750D中系统准确度测试传感器、炉温均匀性测试传感器、控制温度传感器及负载传感器的性能、用途、分类与选择,以及在线原位校准的优点。详细探讨符合美国标准要求的温度传感器的研制与应用。结果表明,作者研制的2750D用温度传感器,完全满足美国标准要求。
This paper briefly introduces the performance,usage,classification and selection of the system accuracy test sensors,temperature uniformity survey sensors,control sensors and load sensors required in the AMS2750D,and the advantages of on-line calibration.The development and applications of the temperature sensors which conform to the standard AMS 2750D are reported.The results show that the as-developed sensors meet the requirements of the AMS 2750D.
出处
《真空》
CAS
2012年第4期4-8,共5页
Vacuum