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CVD金刚石膜中黑色缺陷的存在形式 被引量：1

Existence form of black defects in CVD diamond film
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摘要 采用光学显微镜在透射光、反射光和侧光模式下研究了多晶CVD金刚石厚膜中黑色缺陷的存在形式,利用X射线光电子能谱、拉曼光谱研究了黑色缺陷的组成成分。结果表明:晶界处的裂隙或者孔洞和晶粒内部的结晶缺陷是金刚石膜内部黑色缺陷的存在形式之一。 The existence form of black defects in diamond flim were investigated by optical microscope in transmitted light,reflected light and side light mode.X-ray photoelectronic spectroscopy and Raman spectroscopy were used to analyze the composition of the black defects.The results show that the source of black defects are the fracture or holes in grain boundary and crystal defects.
作者 安晓明 郭辉 孙振路 姜龙 吴晓波
机构地区 河北省激光研究所 河北普莱斯曼金刚石科技有限公司
出处 《真空》 CAS 2012年第4期47-50,共4页 Vacuum
基金 河北省科技支撑项目基金(11215137Z)
关键词 金刚石薄膜 黑色缺陷 光学显微镜 diamond film black defect optical microscope
分类号 TB321 [一般工业技术—材料科学与工程] O484 [理学—固体物理]
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参考文献11

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二级参考文献30

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真空
2012年 第4期

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