2Gong Y, Zhu H Y, Li N. Research on coplanar capacitive sensor design for film thickness measurement[J]. Advanced Materials Research, 2014,945-949( 6 ) : 2030-2036.
3Wang H C, Zyuzin A, Mamishev A V. Measurement of coating thickness and loading using concentric fringing electric field sensors[J]. IEEE Sensors Journal, 2014, 14( 1 ) : 68-78.
4冯昌伦.胶印机的使用与调节四[M].北京:印刷工业出版社,2005:12-14.
5LI X J,ZHANG C H,ZHANG N,et al.Determination of coating thick- ness by crater grounding method [ J ]. Advanced Materials Research, 2013,833 ( 11 ) :237-240.
6DENG L H, LI J H, LIU L G. Research of multi-axes motion control system based on labview platform[ J] .Advanced MateriMs Research, 2012,569(9) :763-768.
