氮化硅陶瓷球面ELID磨削过程控制实验研究

Experimental of Process Control Study on the Si_3N_4 Ceramics Spherical Parts in ELID Grinding

利用ELID技术原理,采用砂轮法向跟踪法在数控坐标磨床上实现了氮化硅陶瓷球面的ELID磨削加工.通过实验研究ELID磨削过程中电解磨削动态平衡策略、电解主动控制策略、电解磨削交叉策略、磨削主动控制策略和径向进给主动控制策略五种过程控制策略,并对表面粗糙度和表面形貌进行了对比.总结出ELID磨削过程最优组合策略:粗磨阶段采用电解主动控制策略,以去除加工材料为主;精磨阶段采用磨削主动控制策略,以去除划痕及减少表面/亚表面损伤为主;光磨阶段采用径向进给主动控制策略,以磨粒的滚动和氧化膜的滑动抛光作用为主.

This paper aims to study ELID grinding for silicon nitride ceramics spherical surface parts by wheel normal tracking method in CNC jig grinders. Through ELID grinding process experiments with the following five process control strategies including electrolysis grinding dynamic balance, electrolysis active control, electrolysis grinding cross, grinding active control and radial feed active control. Morever, the sur- face roughness and surface morphology are compared. It was concluded the optimal combination strategy of ELID grinding process , which is using electrolysis active control strategy in the rough grinding phase of the ELID grinding mianly to remove processing materials, the fine grinding phase applying active control strate- gy is to remove scratches and reduce surface and surface damage for the priority, the buffing phase with ra- dial feed active control strategies is mainly for polishing.