新型氧酰基肟酯类光引发剂的制备与性能

Synthesis and Properties of Novel O-acyl-oxime Ester Photoinitiators

制备了3种新型氧酰基肟酯类光引发剂。并用TLC、DSC和UV等手段对其溶解稳定性、热稳定性及紫外吸收特性进行了表征,发现其溶解稳定性良好,可溶于常见的有机溶剂,有着非常好的热稳定性,并且在g线(436nm)、i线(365nm)和深紫外处(DUV,248nm)都有很好的紫外吸收;还利用实时红外(RT-IR)红外实验及感光性能测试实验对此类光引发剂的光固化性能进行了测试。结果表明,与常见的自由基引发剂ITX、TPO、261等相比,其更适合用于405nm紫激光自由基光聚合成像体系及其他化学增幅光致抗蚀试剂体系中。

Three kinds of novel O-acyl-oxime ester photoinitiators were successfully synthesized. The results of solubility stability, thermal stability and ultraviolet absorption, characterized by TLC, DSC and UV measurements, indicate that the prepared samples exhibit perfect solubility in common organic reagents, excellent thermal stability, and good UV absorption at the wavelength of g-line（436nm）, i-line（365nm） and DUV（248nm）. Also RT IR measurement was conducted to investigate the photopolymerization kinetics of these photoinitiators. The conclusion indicates that the synthesized groups of free-radical initiators would display much better performance than common ones such as ITX or TPO and they are ideally suited for use in 40Sum laser free radical photo polymerization imaging and other chemical amplified photoresist systems.