投影物镜小比率模型的计算机辅助装调

Computer aided alignment of small scale projected objective

针对小比率模型光学系统光学元件数量较多,无法用每个补偿量去补偿对应失调量的问题,提出利用计算机辅助装调方法,通过建立系统的灵敏度矩阵找出偏心失调量和倾斜失调量的内在联系来缩小补偿量的选择范围。根据失调量敏感度的分析,提出了只用4个补偿量补偿系统波像差的想法,并对所选补偿参量的补偿效果进行仿真,以此近一步验证想法的可行性。光学系统初装完成后,将实际测得的系统波像差以36项Fringe Zernike多项式的形式代入灵敏度矩阵,计算得到补偿参量的补偿值和移动方向,用驱动器实现像质补偿。实验结果表明:系统波像差(RMS)由50.864 nm提高到25.993 nm,优于技术指标要求,证明了所选的4个补偿量的正确性和有效性。

Due to the large numbers of lenses,it is impossible for the complex refractive system to use a compensator only to compensate the corresponding misalignment.Based on the aided alignment technology,this paper proposed a method to reduce the range of compensator selection by building a sensitivity matrix and finding the internal relations between decenter disalignments and tip/tilt ones.Then,a method by using only four compensators to compensate the whole optical system was proposed by analyzing the sensitivities of misalignments,and the feasibility of the selected compensators was proved by a simulation.After finishing assembling of the whole optical system,the tested wave front errors were induced into the sensitivity matrix in the form of 36 items of Fringe Zernike polynomials to calculate the values and the moving directions of compensators driven by precision actuators.The test results show that the wave front errors（RMS） have reduced to 25.993 nm from 50.864 nm,which is better than the qualifications and proves that the selected four compensators are right and effective.