微喷部件阵列孔电火花加工工艺试验研究

Study on Micro-EDM Process of Array Micro-holes Using Deionized Water as Working Fluid

比较各种微细阵列孔的电火花加工方法,分析了单电极加工微细阵列孔方法的优点。以去离子水作为工作液,在已研制成功的微喷部件阵列孔电火花加工机床上进行单电极加工微细阵列孔的工艺试验,研究电源参数对微细阵列孔的孔径一致性、加工效率及电极损耗的影响规律。优化微细阵列孔加工的电参数,实现稳定的一次性加工256个直径小于50μm、偏差小于2μm的微细阵列孔。

Several methods of machining array micro-holes by micro-EDM are compared in this paper. The advantages of manufacturing array micro-holes using single electrode are summarized. The experiment of fabricating array micro-holes using single electrode was conducted with the Array Micro- holes EDM machine using deionized water as the dielectric fluid. It mainly studied the influence of electrical parameters on the consistency of diameter of the array micro-holes, the working efficiency and the electrode wear. The electrical parameters are optimized to achieve the purpose of steadily machining 256 micro-holes of which the diameter is less than 50 μm and the diameter deviation is smaller than 2μm.