高温合金脉冲电化学复合抛光实验研究

Study on Pulse Electrochemical Mechanical Combined Polishing of Superalloy

电化学机械复合抛光是近年来发展起来的一种抛光新技术。针对粗糙表面的高效抛光问题,提出一种两阶段的电化学机械复合抛光和纯机械抛光相结合的方法。论述了脉冲电化学机械复合抛光加工的实验设备,进行了系统的工艺参数实验研究;用方差分析的方法分析了各参数对加工试件表面粗糙度影响的显著性,得出最佳的工艺参数;详细分析了不同磨头加工时各参数对表面粗糙度的影响规律。实验研究表明,利用脉冲电化学机械复合抛光的加工方法,采用各种类型的阴极工具头,可实现镜面加工。

Aiming at the problem of effective polishing for rough surface, a two stages electrochemical mechanical polishing method is proposed. The experimental equipment of pulse electrochemi- cal mechanical combined polishing is introduced, the technology rule of process parameters on surface roughness is analyzed and a set of optimized process parameters were obtained. It has been found that pulse electrochemical mechanical combined polishing is suitable for mirror machining.