扩散炉反应管压力自平衡系统的设计

The Process Tube Pressure Control System Design in Diffusion Furnace for Crystalline Silicon Cells

对晶体硅太阳能电池片生产用扩散炉反应管压力平衡系统的要求及原理进行了阐述,由于反应管内气流变化对扩散效果影响很大,本系统根据实际使用经验,对工艺管内压力进行检测,在外围尾气排放不稳定的条件下,对反应管内气体排放进行调节,从而控制管内压力,使管内流速均匀,达到好的扩散效果。

The requirements and principle of the process tube pressure control system in diffusion furnace for crystalline silicon cell are introduced, because the flow changes in tube is very large to diffusion effect, according to the practical experience, The system tests the process tube pressure and regulates the exhaust under peripheral system instability, thereby control the pressure in the tube, the tube flow evenly, achieve good diffusion effect.