摘要
当前镓提纯方法大部分采用电解法,电解法生产出的镓晶体纯度不高,常常形成个别杂质元素超标。为了提高其晶体纯度,需采用晶体提拉法来进一步弥补并提升镓晶体提纯工艺方法。从分析镓单晶炉生长的工艺特点出发,简要介绍镓单晶生长设备的设计思想以及新近开发设计的新型镓单晶炉的机械结构及电气控制系统。
Currently most of the gallium purification method using electrolysis, the method to produce gallium crystal purity is not high. Often cause excessive individual impurity elements problems. To be able to improve the purity of crystal, we use the crystal pulling method to further to compensate for and enhance the gallium crystal purification process. Based on the analysis of the characteristics on growth of gallium single crystal furnace process, brief introduce the design ideas and the new module＇s mechanical structure and electrical control systems of the Gallium single crystal growth furnace.
出处
《电子工业专用设备》
2012年第7期40-43,共4页
Equipment for Electronic Products Manufacturing
关键词
镓单晶炉
工艺特点
轴冷系统
机械结构
电气控制
Gallium single crystal furnace
Process characteristics
Axial cooling system
Mechanical structure
Electrical control
