摘要
采用溶胶-凝胶法制备纳米晶镍锌钴铁氧体/二氧化硅复合粉体,并将该粉体制成靶材。采用磁控溅射法在单晶硅基底和玻璃基底上沉积镍锌钴铁氧体复合薄膜,并对其进行磁性能研究。研究结果表明:镍锌钴铁氧体/二氧化硅复合薄膜具有较好的软磁性能;在相同的溅射条件下,两种基片上的薄膜的矫顽力都较小,但硅基片上薄膜的饱和磁化强度较玻璃基片上的大,软磁性能更好;经后退火处理,薄膜的饱和磁化强度得到明显地提高,软磁性能得到改善。
The nano-erystalline Ni0.3 CO0.2 Zn0.5 Fe204/SiO2 composite powder was prepared by sol-gel method and the target was prepared with the composite powder. The ferrite thin films were deposited on glass and monocrystalline silicon substrates by magnetron sputtering, and the magnetic properties were studied. The results showed the NiZnCo ferrites/SiO2 composite films had good soft magnetic properties. In the same sputtering process conditions, the film deposited on silicon substrate had higher saturation magnetization than the film deposited on glass. However ,they both had small coercive force. The saturation magnetization was obviously enhanced and the soft magnetism was improved after post-annealing treatment.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2012年第4期916-919,共4页
Bulletin of the Chinese Ceramic Society
关键词
铁氧体薄膜
软磁性能
磁控溅射
饱和磁化强度
矫顽力
ferrite film
soft magnetism
magnetron sputtering
saturation magnetization
coercive force
