蒸发用磁偏转电子枪的原理与结构分析

Principle and structure analysis of magnetic deflection EB gun

空间用砷化镓太阳电池的介质膜和金属膜的制备主要依靠真空条件下电子枪的蒸发来完成。深入分析电子枪的原理和结构,有利于改善蒸发工艺,如:可根据不同的蒸发材料选择不同的形式的电子枪,确定不同的扫描方式和蒸发功率等,达到更加完美的蒸发效果。

Space GaAs solar cell dielectric film and metal film were prepared by the EB gun evaporation under vacuum condition.The principle and structure of EB gun was analyzed in detail,which was beneficial to improve the evaporation process;for example,according to different evaporation materials,the different forms of EB gun were selected,the different scan modes and evaporation power could be determined,so as to achieve the more perfect evaporation effect.