精密主动减振器技术研究现状与进展

Developments and Prospects of Active Vibration Isolator for Precision Equipment

环境振动直接降低精密制造和测量设备的动态性能,成为其性能的主要影响因素。主动减振器用于衰减地基振动和负载直接扰动,以维持精密设备的负载平台的稳定性。主动减振器按固有频率的差异,区分为软式主动减振器和硬式主动减振器。高刚性的硬式主动减振器衰减负载的直接扰动力和结构模态,低刚性的软式主动减振器能较好的隔离地基振动。论述两种类型主动减振器的结构技术的研究成果、研究进展和及其应用。针对精密设备发展对主动减振器的应用需求,对硬式主动减振器和软式主动减振器的结构技术的发展前景进行展望,指出其发展面临的挑战与有待解决的关键技术。

Environment vibration directly leads to dynamic performance degradation and becomes one of key impact factors on the precision equipment performance. Active vibration isolator is used to damp the environment vibration both from base disturbance and direct disturbance in order to maintain the stability of the payload of precision equipment. Active vibration isolators are classified into hard mounts and soft mounts according to its natural fre- quency. Hard mounts are commonly used to damp direct disturbance and structure mode of the payload with their high stiffness while soft mounts are used to isolate the base disturbance. The technological prospects about struc- tures of both soft mounts and hard mounts are given and some challenges and unsolved key technologies for the structure of active vibration isolator are proposed.