FeCuNbSiB薄膜的纵向驱动巨磁阻抗效应*

The longitudinally driven giant magneto-impedance effect of FeCuNbSiB films

采用磁控溅射方法制备了单层FeCuNbSiB薄膜,利用HP4294A型阻抗分析仪测量了经不同温度退火的3种不同厚度FeCuNbSiB薄膜的纵向驱动巨磁阻抗效应.实验结果表明:不同厚度薄膜样品的最佳退火温度均为300℃;经300℃退火的0.8,1.5和3.0μm厚薄膜样品在40 kHz驱动频率下的最大巨磁阻抗比分别为60.112%,262.529%和400.279%,外场灵敏度分别为1.06%,3.85%和3.03%/(A.m-1).采用纵向驱动模式可以使单层FeCuNbSiB薄膜在低频下呈现对弱场灵敏响应的巨磁阻抗效应.

FeCuNbSiB single-layer films were prepared by magnetron sputtering. An HP4294A impedance analyzer was used to measure the curves of longitudinally driven giant magneto-impedance. Films with three kinds of thickness were annealed under different temperatures. The results showed that the best annealing temperature was 300 ℃ for samples with different thickness. At a driven frequency of 40 kHz for the samples annealed at 300 ℃, the maximum giant magneto-impedance effect of the samples with thickness of 0.8, 1.5 and 3.0 μm was 60. 112%, 262. 529% and 400.279%, respectively. The sensitivity was 1.06%, 3.85% and 3.03%/（A ·m^-1）, respectively. The longitudinally driven giant magneto-impedance effect of FeCuNbSiB single-layer films showed a high sensitivity to weak field in the low frequency range.