摘要
分析了目前多晶硅生产中氯硅烷精馏的工艺;通过研究和借鉴,经过反复的实验分析、设计优化了氯硅烷精馏工艺,简化了流程,在提高三氯氢硅产品质量的同时,对废气废液充分回收,达到节能减排、降低成本的目的。
The current chlorosilane distillation process in polysilicon production was analysed; through the a- nalysis of repeated experiments, design and optimization of the chlorosilanes distillation process, streamline processes was simplified, the product quality of trichlorosilane, was improved . The exhaust waste is fully recy- cled; energy saving, emission reduction and cost savings were achieved.
出处
《精细与专用化学品》
CAS
2012年第8期17-18,共2页
Fine and Specialty Chemicals
关键词
多晶硅
精馏工艺
优化
polysilicon
distillation process
optimization
