基于虚拟仪器的真空度现场测试系统

Vacuum Tested System of Locale Based on Virtual Instrument Technology

真空度现场测试系统测量范围为(1×105～2×10-9)Pa。文章介绍了该系统的硬件构成和工作原理。该系统硬件部分主要包括电容薄膜真空计、标准电离真空计、分离规和法兰转换套件。基于美国NI公司的Lab-view软件开发平台,结合日常型号服务的热真空试验设备和其它真空设备的测试需求,开发了真空度现场测试软件。软件以模块化思想为基础,可根据不同的测试要求选择相应的测试标准,进而实现数据自动处理,报告自动生成。

Vacuum tested system of locale testing ranges from 10SPa to 2×10^-9 Pa. In this article, the hardware composing and working principle is introduced. The system is made up of capacitance dia- phragm gauges, reference gauges, extractor gauges and flange fittings. Based on the Labview software, to meet the demand of ordinary type service, an vacuum tested system of locale program is developed. This software can be applied to the testing of kinds of vacuum equipment, provides modular structures which may automatically deal with the date of tested machines, and the original record and certificates can go into mass production automatically.