触针式光电三维微位移测量系统设计及标定

Design and calibration of three-dimensional micro-displacement measuring system with photoelectric stylus

提出了一种触针式微位移测量系统的设计方法。该系统通过悬臂梁探针感知微位移变化,通过光学方法对微位移进行放大,并根据微位移测量系统的光路建立了该系统的数学模型,并对数学模型中的系统参数的标定方法进行了分析。完成了微位移测量系统中铍青铜材料低弹性系数的悬臂梁和耐磨探针的设计,最后搭建了系统的实验平台,并在此硬件的基础上完成了参数标定实验和量块及圆柱样件的测量实验,并对圆柱测量数据进行了测头半径补偿,系统测量曲面的精度达到了7 m。实验表明该系统能够很好地应用于微纳测量实验中。

A method of three-dimensional micro-displacement measuring system with photoelectric stylus was pro- posed in this paper. The micro-displacement which was got by cantilever was amplified through optical method. The mathematical model of the micro-displacement measurement system was established based on the optical path, and the calibration methods of the system parameters in the mathematical model were analyzed. In this paper, the design of the beryllium bronze cantilever with low elasticity and the wear-resistant probe were completed. Finally, the experimental platform was built. On the base of system hardware, the system parameters calibration experiments and gauge blocks, cylinder sample measuring experiment were completed. The probe radius compensation of cylinder measurement data was made and the system accuracy when measuring surface reached 7 p^m. The experiments show that the system could achieve the micro-nano measurement tasks.