一种基于压电扫描的新型微梁阵列免疫传感器

A Novel Micro-cantilever Array Immunosensor Based on Piezoelectric Scanning

微梁免疫传感技术是在原子力显微镜和微机电系统基础上发展起来的一项新兴传感技术,具有检测灵敏度高、无需标记、能实时原位再现生化反应过程等优点。本文针对单梁传感系统中存在的环境扰动和不能多通道检测等问题进行改进,设计制作了一种基于压电扫描的新型微梁阵列免疫传感器。利用商品化微梁阵列对传感器进行了温度测试实验,所得信号曲线稳定一致,且检测灵敏度达到2nm,实验结果验证了该微梁阵列传感系统在多通道信号检测中的可行性,为微梁阵列生化传感技术的实现提供了一种新的方案。

Micro-cantilever immunosensor is an emerging sensing technology and has advantages of high sensitivity,label-free and real-time in detection of biochemical reactions,which is developed based on Atomic Force Microscopy and Micro Electronic Mechanical System.In this paper,a new micro-cantilever array immunosensor based on piezoelectric scanning is designed and fabricated,which has solved the problems of environmental disturbance,inability of multi-channel detection in single-cantilever sensing system.A commercially available micro-cantilever array was used for temperature testing,and experimental results have verified the reliability of this micro-cantilever immunosensor sensing system.It provides a new way of micro-cantilever array sensing for biochemical reaction.