摘要
纳米科技独特的魅力在于其纳米效应,而实现纳米效应的关键就是具有纳米结构,周期性纳米结构在高密度数据存储、光子晶体、MEMS和生物传感器中具有大量的应用。不同纳米阵列的研究吸引着各领域的研究人员。本文借助Matlab探究不同参数对多光束激光干涉光刻的影响,从两光束到六束光的干涉模拟中分析入射角、空间角、偏振角和相位差对干涉图案的影响,实现条纹阵列、点阵、孔阵以及发掘新型的蜂窝结构和微型齿轮等独特结构。模拟结构表明激光干涉光刻在实现传统纳米阵列和新型结构方面具有巨大的潜力。
The special charm of Nano Science and Nano Technology ~s tts ~auo ~., ~ fect does have nanostruture first. Periodic nanostructures have a large number of broad prospects in high density data storage, photonic crystal, MEMS and biologic sensors. The research of different nanoarrays attracts the interests of var- ied area researchers. This paper probes into different parameters＇ effect of multi-beam laser interference, particularly in- cident angle, azimuth angle, polarization and relative phase by matlab. We have achieved the grating array, dot array, hole array and some special structures of honeycomb and micro-gear. The simulations indicate the huge potential of re- alization of nanoarray by laser interference lithography.
出处
《长春理工大学学报（自然科学版）》
2012年第2期67-70,共4页
Journal of Changchun University of Science and Technology(Natural Science Edition)
