基于白光干涉术的微器件三维表面形貌恢复研究

The recovery of the3D surface profile of micro device through white-light interference

白光干涉测量技术是光学测量中一种非常重要的方法。介绍了白光干涉测量的原理及系统构成,提出了基于局部峰点插值提取白光干涉信号包络的算法。对局部峰点插值提取包络算法的实现和数据处理的过程进行了讨论,得到了清晰的三维表面形貌图像。

White-light interference measurement is a very important method in optical measurement. In addition to the emphatical discussion of the process of this method conduction and related data processing, this paper introducedthe principle and the system of white-light interference measurement technology and proposed the method for the extraction of white-light interference signal envelop based on the interpolation of the local peak point. 3D surface profile images can he obtained through this method