泄漏检测技术不确定度评价方法浅探

Uncertainty evaluation of leak detection methods

氦质谱检漏是目前比较广泛采用的一种泄漏检测方法,一般采用比对定量的方法给出检漏结果。本文分析了氦质谱检漏的影响因素,从建立数学模型角度分析漏率测量的不确定度,并给出采用氦罩法进行真空泄漏检测时的漏率不确定度范围,为用该方法评价氦质谱检漏结果提供思路,探讨采用该方法提供漏率结果不确定度的合理性和可行性。

Helium leak detection is the more widely used leak detection method, which commonly adopts the quantitative method to give resuhs. This paper analyzes the factors affecting the helium leak detection and the leakage rate measurement uncertainty by a mathematical model. The uncertainty range of helium leak detection was given, which provides ideas for evaluating the results by this method. The rationality and feasibility for the uncertainty evaluation of this method was discussed.