高功率激光装置机械结构件超声波清洗工艺

Ultrasonic cleaning technology of LRU in high power laser system

由大型高功率激光装置的特点,需要其内部的机械结构件表面有较高的洁净度。通常情况下内部的在线可替换单元模块(LRU)等洁净度都要求达到美军标百级水平,因此洁净清洗成为装置集成安装环节一个重要因素。本文根据高功率激光装置建设的工程任务,结合国内相关装置建设的经验,系统分析了超声波清洗的可行性,并配合洁净检测的结果对比验证,证明超声波清洗可以满足洁净清洗的需求。

In high power laser system, the cleanliness inside the LRU must be less than Class 1 （ Fed 209 Class） to the pristine condition of the optical surfaces throughout operation of the facility. The primary design challenge for all the optical LRUs is to meet demanding requirements for cleanliness. According to experiences and the mission of high power laser project construct, the ultrasonic cleaning processes are systematic analysis. Through the testing the cleanliness of the surface on the LRUs, the cleanliness lever can reach class 1. Thus the ultrasonic cleaning system designed can meet the requirement of the high laser system.