尺寸效应对TiC/α-C∶H涂层织构行为的影响

Grain-size effect on the preferred orientation of TiC/α-C∶H thin films

利用磁控溅射法制备了TiC/α-C∶H纳米复合涂层尺寸效应,并对涂层择优取向的影响进行了研究。通过改变涂层中的C含量来调节晶粒尺寸,发现晶粒尺寸对晶粒的择优取向有着重要影响。随着晶粒尺寸减小,TiC的择优取向从面心立方(111)向(200)转变。这种择优取向的尺寸依赖效应可以用热力学来解释。通过计算与尺寸相关的吉布斯自由能解释了尺寸效应与涂层择优取向的关系。

The grain-size effect on the preferred orientation was revealed in TiC/α-C∶H nanocomposite films grown by magnetron sputtering,in which the grain size of TiC can be adjusted through changing C content in the films.The finding showed that the preferred orientation of the films was significantly affected by the grain size,and the crystallographic orientation changed from face-centered cubic（fcc） TiC（111） to（200） as the grain size of nanocrystallite TiC decreased from about 22.3 to about 4.7nm.This size-dependent preferred orientation was explained via thermodynamic calculations,from which the size-dependent Gibbs free energies were found to be a key factor that controled the texture development in the thin films if grain size in the films was sufficient small.