声表面波NO_2传感器敏感膜研究进展

Research progress of sensitive film of SAW NO_2 sensor

由于工业检测、环境监测、医学监测等领域的需求,高性能NO2传感器得到了广泛的研究。声表面波传感器技术的发展为研发高灵敏度、高稳定性、响应快速、小型化的NO2传感器提供了极大的潜能。总结了近30年来声表面波NO2传感器敏感膜的研究现状,并根据现有的研究和传感器的应用需求,深入探讨了声表面波NO2传感器敏感膜面临的挑战和发展趋势。

High-performance NO2 sensors are researched based on the needs of industry detection, environment monitoring, medical monitoring, and so on. The development of surface acoustic wave （ SAW ） sensor technology provides a great potential for manufacturing miniaturized NO2 sensor with high sensitivity, high stability and fast response. The development of the sensitive film applied in SAW NO2 sensor in the past 30 years is summarized, the challenges and development trends of SAW NO2 sensor sensitive film are discussed according to current research and application requirements of sensor.