基于微力传感的扫描近场声显微镜

Scanning Near field Acoustic Microscope Based on Micro force Sensor

描述了一种用于检测超精表面形貌的扫描近场声显微镜 (SNAM )。以谐振频率为 1MHz的未封装伸长型晶振作为微力传感器逼近样品表面 ,在此过程中晶振受到流体阻尼 ,其振动特性发生变化 ,通过检测振动幅值的变化即可获得样品表面形貌信息。在分析SNAM检测机理的基础上设计了SNAM系统 。

A scanning near field acoustic microscope in use for imaging the topography of ultra precise surfaces is presented.As a micro force sensor,a non capsulated 1MHz extension quartz resonator is damped by hydrodynamic forces when approaching an object.Thus the oscillating characteristics of the quartz resonator change.While measuring the decrease of the amplitude of vibrating,the shape of the object can be obtained.Based on the analysis of the principle of SNAM,a SNAM system has been designed.A vertical resolution of 6 nm has been achieved in experiments.