光学元件表面划痕的可视化检测

Visualized Detection of Surface Scratches on Optical Elements

光学元件表面缺陷的存在会影响元件的功能和美观.应用显微成像法完成对缺陷图像的采集,运用Matlab图像处理工具对缺陷图像进行图像处理,提取出划痕缺陷的灰度值特征和几何像素数尺寸特征.根据CCD传感器的像素尺寸和显微物镜的放大倍数从而近似得出划痕的实际尺寸.实验中所测得的划痕最长有104.33μm,最短为5.57μm;最宽为2.37μm,最窄为1.30μm;灰度均值最大为175,最小为97.

Optical element surface defects affect the function and appearance of components. The defects image acquired through microscopic imaging method is processed by the image processing toolbox of Matlab, then the gray value and physical dimension with the number of pixels are extracted. The actual size of scratches is easy to calculate approximatively according to the size of pixel and the magnification factor of microscope objective. According to the experiment. The longest scratch is 104. 33μm,the shortest is 5.57μm, the widest is 2. 37 μm, the narrowest is 1.30 μm; The maximum of gray value of scratches is 175,the minmum is 97.